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Date: Thu, 09/28/2017

NEW Waferplate™ Programmble Bake Plate Designed Specifically For 12” Silicon Wafers

Carlsbad, CA—Torrey Pines Scientific, Inc. announces its new WaferPlate™ Programmable Bake Plate with uniform heating across the surface of better than 1 % over a heating range from room temperature to 350 °C. It is ideal for precisely heating 12” (304.8 mm) and smaller silicon wafers, electronic chips, displays, adhesives, and for doing photo-resists and more.

The WaferPlate™ Model HP90 has a large circular 13.875” (352.4 mm) milled-flat plate aluminum surface with temperature uniformity better than 1 % across the center 12” (304 mm) making it ideal for working with 12” or smaller silicon wafers. The unit is controllable remotely from a PC or industrial controller via the RS-232 I/O port using the command set provided. Also provided is a bench top controller which is fully programmable holding 5 routines of 10 steps each in memory for instant and repeatable recall and use. Each program can be made to repeat itself automatically from 1 to 98 times or infinitely.

drawing of HP90expand ◱

The plate surface can be set from room temperature to 350 °C and can be set and controlled directly to 1 °C. Accuracy is better than 1 % of the heater setting over the entire range. Temperature sensing is by platinum RTD built into the heater plate. The HP90 has temperature ramping from 1 °C/hour to 450 °C/hour, count down timer with alarm and user settable Auto-Off and RS-232 I/O port. The units are supplied with temperature calibration certificates traceable to NIST.

The WaferPlate™ Model HP90 is available in 100, 115, and 230 VAC, 1500 watts, 50/60 Hz models. UL, CSA, and CE certification is pending.

To obtain additional information, contact:

Torrey Pines Scientific, Inc. ®
2713 Loker Avenue West
Carlsbad, CA 92010 USA

Phone: +1 760 930 9400
Toll Free: +1 866 573 9104
Fax: +1 760 930 9480

E-mail: info[at]torreypinesscientific[dot]com
or visit our Web site: http://www.torreypinesscientific.com/.